WF6 galibi ana amfani da shi azaman ɗanyen abu don tsarin tururin tururi (CVD) na ƙarfe tungsten a cikin masana'antar lantarki. WSi2 da aka yi daga WF6 za a iya amfani da shi azaman kayan wayoyi a cikin manyan da'irori masu haɗaɗɗiya (LSI), kuma ana iya amfani da su azaman albarkatun ƙasa don electrodes semiconductor, fluorine Raw kayan don jami'an sinadarai, polymerization catalysts, kayan gani, da sauransu.